MicroAssembly Technologies, Inc.
MEMS Packaging

MicroAssembly has wafer-scale and die-scale MEMS packaging capability, with the flexibility to rapid-turn for prototyping and also meet volume requirements with low-cost. Why MicroAssembly's micropackage is different:

  • Low temperature processing -- compatible with a wide variety of MEMS devices -- from room temperature to 300 C
  • Wafer scale: large volumes at low cost
  • Die scale: quick turnaround prototyping
  • Very thin, non-contaminating, metal-to-metal seals – no organics
  • Near 100% yield -- reliability data with demonstrated hermeticity and very strong bond strength
  • Harsh environments including cryogenic temperatures and high-g shock
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